Advances in hardware technology have enabled very compact, autonomous and mobile nodes each having one or more sensors, computation and communication capabilities, and a power supply. The Smart Dust project is exploring whether an autonomous sensing, computing, and communication system can be packed into a cubic-millimeter mote to form the basis of integrated, massively distributed sensor networks. It focuses on reduction of power consumption, size and cost. To build these small sensors, processors, communication devices, and power supply, designers have used the MEMS (Micro electro mechanical Systems) technology.